{"id":1896,"date":"2024-07-30T07:41:11","date_gmt":"2024-07-30T07:41:11","guid":{"rendered":"http:\/\/www.grapheny.com\/Chinese\/?p=1896"},"modified":"2024-07-30T07:58:17","modified_gmt":"2024-07-30T07:58:17","slug":"inp-mocvd-%e7%94%9f%e9%95%bf%e6%b0%94%e4%bd%93-%e8%8a%af%e7%89%87%e5%b7%a5%e8%89%ba%e6%b0%94%e4%bd%93","status":"publish","type":"post","link":"https:\/\/www.grapheny.com\/Chinese\/inp-mocvd-%e7%94%9f%e9%95%bf%e6%b0%94%e4%bd%93-%e8%8a%af%e7%89%87%e5%b7%a5%e8%89%ba%e6%b0%94%e4%bd%93\/","title":{"rendered":"InP MOCVD \u751f\u957f\u6c14\u4f53 &#038; \u82af\u7247\u5de5\u827a\u6c14\u4f53"},"content":{"rendered":"<p><span style=\"color: #3366ff;\"><strong>\u5728MOCVD\uff08\u91d1\u5c5e\u6709\u673a\u7269\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff09<\/strong><\/span>\u751f\u957fInP\uff08\u78f7\u5316\u94df\uff09\u9700\u8981\u4f7f\u7528\u591a\u79cd\u6c14\u4f53\u3002<\/p>\n<p class=\"p1\">\u5728MOCVD\u751f\u4ea7InP\uff08\u78f7\u5316\u94df\uff09\u5916\u5ef6\u7247\u7684\u8fc7\u7a0b\u4e2d\uff0c\u9700\u8981\u4f7f\u7528\u591a\u79cd\u6c14\u4f53\u3002\u6839\u636e\u641c\u7d22\u7ed3\u679c\uff0cMOCVD\u6280\u672f\u4f7f\u7528\u7684\u6e90\u6750\u6599\u4e3b\u8981\u5305\u62ec\u2162\u65cf\u91d1\u5c5e\u6709\u673a\u5316\u5408\u7269\u3001V\u65cf\u6c22\u5316\u7269\u4ee5\u53ca\u63ba\u6742\u6e90\u3002\u5177\u4f53\u5230InP\u7684MOCVD\u751f\u4ea7\uff0c\u901a\u5e38\u4f7f\u7528\u7684\u6c14\u4f53\u5305\u62ec\uff1a<\/p>\n<p class=\"p1\">1. **\u4e09\u7532\u57fa\u94df\uff08TMI\uff09**\uff1a\u4f5c\u4e3a\u94df\u7684\u6e90\u6750\u6599\uff0c\u662f\u4e00\u79cd\u2162\u65cf\u91d1\u5c5e\u6709\u673a\u5316\u5408\u7269\u3002<\/p>\n<p class=\"p1\">2. **\u78f7\u5316\u6c22\uff08PH3\uff09**\uff1a\u4f5c\u4e3a\u78f7\u7684\u6e90\u6750\u6599\uff0c\u662fV\u65cf\u5143\u7d20\u7684\u6c22\u5316\u7269\u3002<\/p>\n<p class=\"p1\">3. **\u6c22\u6c14\uff08H2\uff09**\uff1a\u901a\u5e38\u7528\u4f5c\u8f7d\u6c14\uff0c\u643a\u5e26\u91d1\u5c5e\u6709\u673a\u5316\u5408\u7269\u5230\u751f\u957f\u533a\uff0c\u5e76\u4e14\u4f5c\u4e3a\u53cd\u5e94\u5ba4\u4e2d\u7684\u7a00\u91ca\u6c14\u4f53\u3002<\/p>\n<p class=\"p1\">4. **\u6c2e\u6c14\uff08N2\uff09**\uff1a\u5728\u67d0\u4e9b\u60c5\u51b5\u4e0b\uff0c\u6c2e\u6c14\u53ef\u80fd\u88ab\u7528\u4f5c\u4fdd\u62a4\u6c14\u4f53\u6216\u4f5c\u4e3a\u5c3e\u6c14\u5904\u7406\u7cfb\u7edf\u7684\u4e00\u90e8\u5206\u3002<\/p>\n<p class=\"p1\">\u5728MOCVD\u7cfb\u7edf\u4e2d\uff0c\u8fd9\u4e9b\u6c14\u4f53\u7684\u6d41\u91cf\u3001\u6e29\u5ea6\u63a7\u5236\u9700\u8981\u975e\u5e38\u7cbe\u786e\uff0c\u4ee5\u786e\u4fdd\u751f\u957f\u51fa\u9ad8\u8d28\u91cf\u7684InP\u5916\u5ef6\u5c42\u3002\u53cd\u5e94\u5ba4\u901a\u5e38\u5728500-1200\u2103\u7684\u6e29\u5ea6\u8303\u56f4\u5185\u64cd\u4f5c\uff0c\u4f7f\u7528\u76f4\u6d41\u52a0\u70ed\u77f3\u58a8\u57fa\u5ea7\uff0c\u800c\u886c\u5e95\u653e\u7f6e\u5728\u57fa\u5ea7\u4e0a\u65b9\u3002\u6b64\u5916\uff0cMOCVD\u8bbe\u5907\u8fd8\u5305\u62ec\u5c3e\u6c14\u5904\u7406\u7cfb\u7edf\uff0c\u4ee5\u5904\u7406\u53cd\u5e94\u540e\u4ea7\u751f\u7684\u6c14\u4f53\uff0c\u786e\u4fdd\u5b89\u5168\u548c\u73af\u4fdd\u3002<\/p>\n<p class=\"p1\">\u5728\u751f\u4ea7\u8fc7\u7a0b\u4e2d\uff0c\u4e3a\u4e86\u786e\u4fdd\u6c89\u79ef\u8fc7\u7a0b\u7684\u91cd\u590d\u6027\u548c\u9ad8\u6536\u7387\uff0c\u9700\u8981\u7cbe\u786e\u63a7\u5236\u6c14\u4f53\u7684\u6d41\u91cf\u3001\u6e29\u5ea6\u548c\u538b\u529b\u3002\u8fd9\u4e9b\u6c14\u4f53\u901a\u8fc7\u8d77\u6ce1\u5668\u6c7d\u5316\uff0c\u63a7\u5236MO\u6e90\u6d53\u5ea6\u3001\u751f\u957f\u65f6\u95f4\u548c\u751f\u957f\u901f\u7387\uff0c\u90e8\u5206MO\u6e90\u7528\u8f7d\u6c14\u6d41\u5e26\u51fa\u6e90\u74f6\uff0c\u5e76\u4ece\u8d77\u6ce1\u5668\u6d41\u5411\u8154\u5ba4\u3002\u5728\u8fd9\u4e2a\u8fc7\u7a0b\u4e2d\uff0c\u6355\u83b7\u7684MO\u6e90\u7684\u6d53\u5ea6\u5fc5\u987b\u662f\u5df2\u77e5\u7684\uff0c\u5e76\u4e14\u5177\u6709\u91cd\u590d\u6027\uff0c\u4ee5\u63d0\u4f9b\u6700\u5927\u7684\u5de5\u827a\u6548\u7387\u3002<\/p>\n<p class=\"p1\">\u603b\u7ed3\u6765\u8bf4\uff0cMOCVD\u751f\u4ea7InP\u5916\u5ef6\u7247\u6d89\u53ca\u5230\u7684\u6c14\u4f53\u4e3b\u8981\u5305\u62ec\u4e09\u7532\u57fa\u94df\u3001\u78f7\u5316\u6c22\u3001\u6c22\u6c14\u548c\u53ef\u80fd\u7684\u6c2e\u6c14\uff0c\u8fd9\u4e9b\u6c14\u4f53\u5728\u7cbe\u786e\u63a7\u5236\u7684\u6761\u4ef6\u4e0b\u7528\u4e8e\u751f\u957f\u9ad8\u8d28\u91cf\u7684InP\u5355\u6676\u6750\u6599\u3002<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p class=\"p1\"><span style=\"color: #3366ff;\"><strong>\u5728\u5236\u9020InP\u6fc0\u5149\u5668\u7684\u8fc7\u7a0b\u4e2d<\/strong><\/span>\uff0c\u523b\u8680\u5de5\u827a\u662f\u5173\u952e\u6b65\u9aa4\u4e4b\u4e00\u3002\u4ee5\u4e0b\u662f\u4e00\u4e9b\u5728InP\u523b\u8680\u8fc7\u7a0b\u4e2d\u5e38\u7528\u7684\u6c14\u4f53\uff1a<\/p>\n<p class=\"p1\">1. **\u6c2f\u6c14\uff08Cl2\uff09**\uff1a\u6c2f\u6c14\u662f\u5e38\u7528\u7684\u523b\u8680\u6c14\u4f53\uff0c\u80fd\u591f\u6709\u6548\u5730\u523b\u8680InP\u6750\u6599\u3002\u7814\u7a76\u8868\u660e\uff0c\u4f7f\u7528Cl2\/BCl3\u6c14\u4f53\u7684\u611f\u5e94\u8026\u5408\u7b49\u79bb\u5b50\u4f53\uff08ICP\uff09\u523b\u8680\u53ef\u4ee5\u5b9e\u73b0\u4f4e\u635f\u4f24\u3001\u9ad8\u5404\u5411\u5f02\u6027\u7684\u523b\u8680\u6548\u679c\u3002<\/p>\n<p class=\"p1\">2. **\u6c2f\u5316\u787c\uff08BCl3\uff09**\uff1a\u4e0e\u6c2f\u6c14\u6df7\u5408\u4f7f\u7528\uff0c\u53ef\u4ee5\u63d0\u9ad8\u523b\u8680\u7684\u9009\u62e9\u6027\u548c\u5404\u5411\u5f02\u6027\u3002<\/p>\n<p class=\"p1\">3. **\u6c29\u6c14\uff08Ar\uff09**\uff1a\u6c29\u6c14\u5728\u523b\u8680\u8fc7\u7a0b\u4e2d\u8d77\u5230\u7269\u7406\u523b\u8680\u7684\u4f5c\u7528\uff0c\u6709\u52a9\u4e8e\u5f62\u6210\u5782\u76f4\u7684\u4fa7\u58c1\u3002\u7814\u7a76\u8868\u660e\uff0cCl2\/Ar\u6df7\u5408\u6c14\u4f53\u5728ICP\u523b\u8680\u4e2d\u53ef\u4ee5\u63d0\u9ad8\u523b\u8680\u901f\u7387\u548c\u8868\u9762\u5e73\u6574\u5ea6\u3002<\/p>\n<p class=\"p1\">4. **\u6c22\u6c14\uff08H2\uff09**\uff1a\u6c22\u6c14\u5728\u523b\u8680\u8fc7\u7a0b\u4e2d\u53ef\u4ee5\u51cf\u5c11\u523b\u8680\u533a\u8868\u9762\u7684\u7c97\u7cd9\u5ea6\uff0c\u5e76\u6709\u52a9\u4e8e\u5f62\u6210\u8fde\u7eed\u7684\u4fa7\u58c1\u3002<\/p>\n<p class=\"p1\">5. **\u7532\u70f7\uff08CH4\uff09**\uff1a\u5728\u67d0\u4e9b\u60c5\u51b5\u4e0b\uff0c\u7532\u70f7\u53ef\u4ee5\u4f5c\u4e3a\u523b\u8680\u6c14\u4f53\u7684\u4e00\u90e8\u5206\uff0c\u4e0e\u6c2f\u6c14\u548c\u6c22\u6c14\u6df7\u5408\u4f7f\u7528\uff0c\u4ee5\u6539\u5584\u523b\u8680\u6548\u679c\u3002<\/p>\n<p class=\"p1\">\u8fd9\u4e9b\u6c14\u4f53\u5728\u4e0d\u540c\u7684\u523b\u8680\u5de5\u827a\u4e2d\u53ef\u80fd\u4f1a\u6709\u4e0d\u540c\u7684\u6bd4\u4f8b\u548c\u7ec4\u5408\uff0c\u4ee5\u5b9e\u73b0\u6700\u4f73\u7684\u523b\u8680\u6548\u679c\u3002\u4f8b\u5982\uff0cCl2\/Ar\/H2\u6df7\u5408\u6c14\u4f53\u5728ICP\u523b\u8680\u7cfb\u7edf\u4e2d\u88ab\u7528\u4e8eInP\u57fa\u534a\u5bfc\u4f53\u6750\u6599\u7684\u5e72\u6cd5\u523b\u8680\uff0c\u523b\u8680\u6df1\u5ea6\u53ef\u8fbe10\u5fae\u7c73\uff0c\u8868\u9762\u76f8\u5bf9\u5e73\u6ed1\u3002\u6b64\u5916\uff0cCl2\/CH4\/H2\u6df7\u5408\u6c14\u4f53\u4e5f\u88ab\u7528\u4e8eInP\/InGaAs\u591a\u5c42\u819c\u7684\u523b\u8680\uff0c\u80fd\u591f\u5b9e\u73b0\u5e73\u6574\u8fde\u7eed\u7684\u4fa7\u58c1\u548c\u8f83\u5c0f\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u5728MOCVD\uff08\u91d1\u5c5e\u6709\u673a\u7269\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff09\u751f\u957fInP\uff08\u78f7\u5316\u94df\uff09\u9700\u8981\u4f7f\u7528\u591a\u79cd\u6c14\u4f53\u3002 \u5728MOCVD\u751f\u4ea7InP\uff08\u78f7\u5316\u94df\uff09\u5916\u5ef6\u7247\u7684\u8fc7\u7a0b\u4e2d\uff0c\u9700\u8981\u4f7f\u7528\u591a\u79cd\u6c14\u4f53\u3002\u6839\u636e\u641c\u7d22\u7ed3\u679c\uff0cMOCVD\u6280\u672f\u4f7f\u7528\u7684\u6e90\u6750\u6599\u4e3b\u8981\u5305\u62ec\u2162\u65cf\u91d1\u5c5e\u6709\u673a\u5316\u5408\u7269\u3001V\u65cf\u6c22\u5316\u7269\u4ee5\u53ca\u63ba\u6742\u6e90\u3002\u5177\u4f53\u5230InP\u7684MOCVD\u751f\u4ea7\uff0c\u901a\u5e38\u4f7f\u7528\u7684\u6c14\u4f53\u5305\u62ec\uff1a 1. **\u4e09\u7532\u57fa\u94df\uff08TMI\uff09**\uff1a\u4f5c\u4e3a\u94df\u7684\u6e90\u6750\u6599\uff0c\u662f\u4e00\u79cd\u2162\u65cf\u91d1\u5c5e\u6709\u673a\u5316\u5408\u7269\u3002 2. **\u78f7\u5316\u6c22\uff08PH3\uff09**\uff1a\u4f5c\u4e3a\u78f7\u7684\u6e90\u6750\u6599\uff0c\u662fV\u65cf\u5143\u7d20\u7684\u6c22\u5316\u7269\u3002 3. **\u6c22\u6c14\uff08H2\uff09**\uff1a\u901a\u5e38\u7528\u4f5c\u8f7d\u6c14\uff0c\u643a\u5e26\u91d1\u5c5e\u6709\u673a\u5316\u5408\u7269\u5230\u751f\u957f\u533a\uff0c\u5e76\u4e14\u4f5c\u4e3a\u53cd\u5e94\u5ba4\u4e2d\u7684\u7a00\u91ca\u6c14\u4f53\u3002 4. **\u6c2e\u6c14\uff08N2\uff09**\uff1a\u5728\u67d0\u4e9b\u60c5\u51b5\u4e0b\uff0c\u6c2e\u6c14\u53ef\u80fd\u88ab\u7528\u4f5c\u4fdd\u62a4\u6c14\u4f53\u6216\u4f5c\u4e3a\u5c3e\u6c14\u5904\u7406\u7cfb\u7edf\u7684\u4e00\u90e8\u5206\u3002 \u5728MOCVD\u7cfb\u7edf\u4e2d\uff0c\u8fd9\u4e9b\u6c14\u4f53\u7684\u6d41\u91cf\u3001\u6e29\u5ea6\u63a7\u5236\u9700\u8981\u975e\u5e38\u7cbe\u786e\uff0c\u4ee5\u786e\u4fdd\u751f\u957f\u51fa\u9ad8\u8d28\u91cf\u7684InP\u5916\u5ef6\u5c42\u3002\u53cd\u5e94\u5ba4\u901a\u5e38\u5728500-1200\u2103\u7684\u6e29\u5ea6\u8303\u56f4\u5185\u64cd\u4f5c\uff0c\u4f7f\u7528\u76f4\u6d41\u52a0\u70ed\u77f3\u58a8\u57fa\u5ea7\uff0c\u800c\u886c\u5e95\u653e\u7f6e\u5728\u57fa\u5ea7\u4e0a\u65b9\u3002\u6b64\u5916\uff0cMOCVD\u8bbe\u5907\u8fd8\u5305\u62ec\u5c3e\u6c14\u5904\u7406\u7cfb\u7edf\uff0c\u4ee5\u5904\u7406\u53cd\u5e94\u540e\u4ea7\u751f\u7684\u6c14\u4f53\uff0c\u786e\u4fdd\u5b89\u5168\u548c\u73af\u4fdd\u3002 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\u603b\u7ed3\u6765\u8bf4\uff0cMOCVD\u751f\u4ea7InP\u5916\u5ef6\u7247\u6d89\u53ca\u5230\u7684\u6c14\u4f53\u4e3b\u8981\u5305\u62ec\u4e09\u7532\u57fa\u94df\u3001\u78f7\u5316\u6c22\u3001\u6c22\u6c14\u548c\u53ef\u80fd\u7684\u6c2e\u6c14\uff0c\u8fd9\u4e9b\u6c14\u4f53\u5728\u7cbe\u786e\u63a7\u5236\u7684\u6761\u4ef6\u4e0b\u7528\u4e8e\u751f\u957f\u9ad8\u8d28\u91cf\u7684InP\u5355\u6676\u6750\u6599\u3002 &nbsp; &nbsp; \u5728\u5236\u9020InP\u6fc0\u5149\u5668\u7684\u8fc7\u7a0b\u4e2d\uff0c\u523b\u8680\u5de5\u827a\u662f\u5173\u952e\u6b65\u9aa4\u4e4b\u4e00\u3002\u4ee5\u4e0b\u662f\u4e00\u4e9b\u5728InP\u523b\u8680\u8fc7\u7a0b\u4e2d\u5e38\u7528\u7684\u6c14\u4f53\uff1a 1. 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